Aleksandr Yu. Shemakhin, Ildar Sh. Abdullin, Viktor S. Zheltukhin, Elena A. Makeeva

Kazan (Volga Region) Federal University, Limited Corporation “Plazma-VST”

Experimental measurements of parameters of a stream radio frequency inductive coupled discharge of intermediate pressure in a discharge chamber and a jet, measurements of ion energy and ion current density on the sample surface, validation of a mathematical model of a stream RF discharge of intermediate pressure on experimental data were carried out. It has been established that a stream RF discharge of intermediate pressure in the pressure range of 13.3-133 Pa is a new type of radio frequency intermediate pressure discharge of a combined type, which differs both from an RF discharge in an atmospheric pressure gas stream with a solenoid inductor, and from a low-pressure RF discharge in a plasma torch with a flat spiral antenna, and from an RF discharge-low pressure discharge with a solenoid inductor.

stream RF discharge, intermediate pressure, plasma flow, experimental studies, model validation, ICRF