MATHEMATICAL MODELLING OF RF PLASMA AT LOW PRESSURES FOR CYLINDRIC VACUUM CHAMBER WITH CHARGED SPECIMAN
A. Yu. Shemakhin, V. S. Zheltukhin, E. Yu. Shemakhin
Kazan Federal University, Kazan State Technical University
A hybrid mathematical model for the Knudsen numbers 8 ⋅ 10−3 −7 ⋅ 10−2 for the carrier gas has been developed to simulate processes in a low pressure RF plasma with gas flow. The model includes an initial boundary value problem for the kinetic Boltzmann equation describing the distribution function of the carrier neutral gas, boundary value problems for the continuity equation of the electronic, ionic and metastable components, the electron energy conservation equations, for Maxwell’s RF equations in the form of telegraphic equations and the Poisson equation for the potential part of field. The results of the calculation of the electric intensity, the concentration of electrons, iоnes and metastables, the potential component of the electromagnetic field in a cylindrical vacuum chamber are presented
ICRF plasma, jet stream, low pressure, metastables, hybrid model